FCT - Fundação para a Ciência e a Tecnologia (POCI 2010, FEDER)

REEQ/379/EEI/2005

Micro-sistemas em silício com RF para aplicações biomédicas: um laboratório num chip

Investigador responsável: Higino Correia (higino.correia@dei.uminho.pt)

University of Minho

Dept. Industrial Electronics

Campus Azurem 4800-058 Guimaraes

Phone:+351 253 510190 Fax: : +351 253 510189

A complete infrastructure is available with equipments as: mask aligner, electron beam evaporator, dicing and saw system, spectrum analyzer, computer tomography system, process bench for silicon wafers, spin coating for silicon wafers and respective owen for baking. This infrastructure is related with the microtechnologies in silicon. University of Minho and UTAD University are the participants and the infrastructure is located at University of Minho.

Also, investigators of external groups working in the same area can use these facilities by the way of acquisition services, please contact Prof. Higino Correia.

Spectrum Analyzer-Agilent E4404B

Process Bench for Silicon Wafer-WetBench Arias

Mask Aligner – SUSS Microtec-MJB3

Computer Tomography System – Siemens Somatom Esprit

Dicing and Saw system, Model Disco DAD 2H/6T

Spin coating for Silicon Wafers-Arias POLOS 200

Electron Beam Evaporator, model EV M-6